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上海微电子：第一台28nm国产光刻机交付在即 - 硬件 - cnBeta.COM
source link: https://www.cnbeta.com/articles/tech/987561.htm
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据媒体报道，上海微电子装备(集团)股份有限公司披露，将在2021-2022年交付第一台28nm工艺的国产的沉浸式光刻机。虽然这与当今国际顶尖的7nm乃至是5nm光刻机还有数代的隔阂，但是差距已经大大缩小，毕竟在此之前国产光刻机还是90nm。
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